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Ships within 48 hours · Estimated delivery Oct 20 - Oct 25
It replaces the previous #607-STM Grating Replica with 463nm pitch
15µm for Ti
Microscopists and engineers using high performance SEMs or FIB systems will find this calibration test specimen useful
The OTESPA probes cover a wide range of applications
Test Grating for X-, Y- and Z-direction 55 kHz It replaces the previous #607-STMDESCRIPTION The TG3D 3000 20 test grating with its truly 3 Dimensional structure is intended for simultaneous calibration in X , Y and Z direction, lateral calibration of SPM scanners and detection of any lateral nonlinearity, hysteresis, creep and cross coupling effects. Structure: Si wafer with SiO2 layer for grating Pattern type: 3 Dimensional array of small squares Height: 20 1. 5nm Square size: 1. 5 0. 15m Period: 3 0. 05m Chip size: 5 x 5 x 0.
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